METHOD AND DEVICE FOR SUPPLYING ELECTRICAL POWER
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United States of America Patent
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Issued Date -
Dec 9, 2010
app pub date -
Oct 9, 2008
filing date -
Oct 10, 2007
priority date (Note) -
Abandoned
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Abstract
Method and device for supplying electrical power to a wafer that is at least partially submerged in a liquid. The device comprises: —a container filled with the liquid; —a transportation device comprising a wafer carrier device for transporting the wafer at least partially submerged through the liquid; —a power supply device for supplying electrical power to the wafer.
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