MICROMACHINED FLUID EJECTOR
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United States of America Patent
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Issued Date -
Dec 2, 2010
app pub date -
Mar 28, 2008
filing date -
Mar 31, 2007
priority date (Note) -
Abandoned
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Abstract
This invention relates to micromachined fluid ejector arrays having a fluid reservoir bounded at one side by an elastic membrane having scalable arrays of orifices arranged between concentric piezoelectric transducers, and bounded at another side by a top cover supported by surrounding walls. By actuating neighboring concentric piezoelectric transducers, the scalable array of orifices arranged between the actuated neighboring concentric piezoelectric transducers deflect to eject fluid droplets. Also disclosed is a micromachined fluid ejector array having a fluid reservoir bounded at one side by an elastic membrane having scalable arrays of orifices arranged between concentric piezoelectric transducers, and at another side by a top cover supported by surrounding walls with a piezoelectric layer bonded on top of the top cover. By actuating the piezoelectric layer, the scalable arrays of orifices arranged between the neighboring concentric piezoelectric transducers deflect in phase to eject fluid droplets.
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