FABRICATION OF METALLIC STAMPS FOR REPLICATION TECHNOLOGY
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United States of America Patent
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Issued Date -
Dec 2, 2010
app pub date -
May 26, 2010
filing date -
May 29, 2009
priority date (Note) -
Abandoned
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Abstract
The electrodeposited Nickel stamp is replicated from a conductive master, e.g. Titanium metallic master instead of a photoresist patterned master. The conductive layer is served as a working electrode in the subsequent electrodepositing of the Nickel metal. After the electroplating, Nickel stamps are obtained by peeling the Nickel metal sheet off the conductive layer of the metallic master. Low adhesion between metallic master and Nickel stamp make it possible to delaminate the Nickel stamp without any defects.
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