Cobalt-iron alloy sputtering target with high pass through flux and method for manufacturing the same
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United States of America Patent
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Issued Date -
Dec 2, 2010
app pub date -
May 26, 2009
filing date -
May 26, 2009
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Abandoned
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Abstract
A cobalt-iron alloy sputtering target is made by melting and casting process and consists of cobalt, iron and additive metal, wherein the cobalt has an increased pass through flux content in the cobalt-iron alloy sputtering target and the additive metal has a content from 8 at % 20 at % and is at least one metal selected from the group consisting of tantalum, zirconium, niobium, hafnium, aluminum and chromium. The cobalt-iron alloy sputtering target has increased pass through flux.
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