METAL PATTERNING FOR ELECTRICALLY CONDUCTIVE STRUCTURES BASED ON ALLOY FORMATION

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United States of America Patent

APP PUB NO 20100294352A1
SERIAL NO

12469101

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Abstract

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Layered metal structures are patterned to form a surface with some locations having an alloy along the top surface at some locations and the original top metal layer at other locations along the surface. The alloy and original top metal layer can be selected to have differential etching properties such that the pattern of the alloy or original metal can be selectively etched to form a patterned metal interconnect. In general, the patterning is performed by localized heating that drives formation of the alloy at the heated locations. The metal patterning can be useful for solar cell applications as well as for electronics applications, such as display applications.

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Patent Owner(s)

Patent OwnerAddress
NANOGRAM CORPORATION49040 MILMONT DRIVE FREMONT CA 94538

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hieslmair, Henry San Francisco, US 25 437
Pakala, Neeraj Cupertino, US 5 64
Sanders, William A Palo Alto, US 4 101
Srinivasan, Uma Mountain View, US 51 782

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