PROCESS AND DEVICE FOR THE PRODUCTION OF HIGH-PURITY SILICON USING MULTIPLE PRECURSORS
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United States of America Patent
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Issued Date -
Nov 18, 2010
app pub date -
Sep 27, 2007
filing date -
Oct 2, 2006
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Abstract
Using a transformer coupled plasma reactor, it is possible to achieve continuous production of plasma which decomposes precursors containing silicon in order to produce pure silicon powder. The pure silicon powder is then gathered, treated and used to produce ingots of silicon for use in photovoltaics or semiconductors.
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