CERAMIC SPUTTERING TARGET ASSEMBLY AND A METHOD FOR PRODUCING THE SAME
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United States of America Patent
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May 12, 2009
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May 12, 2009
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Abstract
A method for producing a ceramic sputtering target assembly has steps of providing a backing plate and forming a solder layer on a surface of the backing plate; providing a ceramic target and forming an interface layer on a surface of the ceramic target; annealing the ceramic target with the interface layer; and solder-bonding the solder layer of the backing plate and the interface layer of the ceramic target to obtain the ceramic sputtering target assembly. By annealing the interface layer made of chromium or chromium-containing alloy, the interface layer provides excellent adhesive ability to solder-bonding the solder layer and allows the ceramic target and the backing plate to be combined securely.
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