LED-based UV illuminators and lithography systems using same

United States of America Patent

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Issued Date
Nov 11, 2010
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Aug 7, 2009
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May 7, 2009

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. Lithography systems that utilize the LED-based UV illuminator are also disclosed.

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ULTRATECH INC	3050 ZANKER ROAD SAN JOSE CA 95134

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Inventor Name	Address	# of filed Patents	Total Citations
Hawryluk, Andrew M	Los Altos, US	82	2909

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LED-based UV illuminators and lithography systems using same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

12462678

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12462678

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