ULTRAVIOLET-RESISTANT MATERIALS AND DEVICES AND SYSTEMS INCLUDING SAME

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United States of America Patent

APP PUB NO 20100275845A1
SERIAL NO

12048117

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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UV-resistant materials are disclosed that include at least one self-supporting film of UV-resistant clay particles and that are substantially non-reactive to incident UV radiation. An exemplary material is substantially non-transmissive to at least one UV wavelength of less than 300 nm, can include a polymeric material for enhanced flexibility, and can include an additive that is non-transmissive to at least one UV wavelength of greater than 300 nm. The material can be multiple layers of respective clay films. The materials can be used to form UV-resistant devices such as seals, mounting cushions, and light-shields for use in any of various UV-illumination sources and process systems. An example UV-illumination source is an excimer laser. An example system is a light-CVD system.

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Patent Owner(s)

Patent OwnerAddress
HOYA CANDEO OPTRONICS CORPORATION5-24 HIKAWA-CHO 3-CHOME SAITAMA-KEN TODA-SHI 335-0027

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kogure, Yasuo Saitama, JP 25 203

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