THERMAL SPRAY COATINGS FOR SEMICONDUCTOR APPLICATIONS
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United States of America Patent
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Issued Date -
Oct 28, 2010
app pub date -
Oct 20, 2009
filing date -
Nov 4, 2008
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Abandoned
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Abstract
This invention relates to thermal spray coatings on a metal or non-metal substrate. The thermal spray coating comprises a partially or fully stabilized ceramic coating, e.g., yttria stabilized zirconia coating, and has sufficiently high thermodynamic phase stability to provide corrosion and/or erosion resistance to the substrate. This invention also relates to methods of protecting metal and non-metal substrates by applying the thermal spray coatings. The coatings are useful, for example, in the protection of integrated circuit manufacturing equipment, internal chamber components, and electrostatic chuck manufacture.
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