METHODS AND SYSTEMS FOR REDUCING SCANNER IMAGE DISTORTION
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United States of America Patent
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Issued Date -
Oct 14, 2010
app pub date -
Apr 13, 2010
filing date -
Apr 13, 2009
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A scanning apparatus includes a sample stage that faces an optical scanning head or stage at a scanning plane; a first actuator that translates the sample stage or the optical stage along a first axis that is substantially parallel to the scanning plane; a sensor that senses the deviation from the first axis; and a controller coupled to the first actuator, the sensor, and the optical stage. The controller is programmed to operate the first actuator and the optical stage to acquire a scan of a sample at the sample stage; and modify the scan to compensate for a deviation from the first axis in translation of the sample stage or the optical stage along the first axis by the first actuator. Also included are methods of modifying scans to compensate for translation deviations.
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