Tip-sharpened carbon nanotubes and electron source using thereof
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United States of America Patent
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Issued Date -
Oct 14, 2010
app pub date -
Dec 27, 2006
filing date -
Dec 28, 2005
priority date (Note) -
Abandoned
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Abstract
An electron microscope comprising an electron emitting cathode equipped with a carbon nanotube and an extraction unit to field-emit electrons. The carbon nanotube contains a sharp portion which is approximately conical shape at tip thereof closed at the electron-emitting cathode.A method of manufacturing carbon nanotube having a sharp angle part at the tip thereof, comprising a step of placing and heat-treating a tip-sharpened carbon nanotube still at a lower temperature than a phase transition temperature and a step of placing and heat-treating a tip-sharpened carbon nanotube still at a higher temperature than a phase transition temperature.
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