ACTIVE WAFER PROBE
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United States of America Patent
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app pub date -
Jun 16, 2010
filing date -
Dec 24, 2003
priority date (Note) -
Abandoned
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Abstract
A probe suitable for probing a semiconductor wafer that includes an active circuit. The probe may include a flexible interconnection between the active circuit and a support structure. The probe may impose a relatively low capacitance on the device under test.
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