EQUIPMENT AND METHOD FOR CLEANING POLISHING CLOTH
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United States of America Patent
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Issued Date -
Sep 30, 2010
app pub date -
Mar 26, 2010
filing date -
Mar 27, 2009
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The equipment for cleaning polishing cloth is capable of increasing pressure of washing water received by the polishing cloth, securely removing deposits from the polishing cloth and improving polishing efficiency. The equipment is used in a polishing apparatus, in which a work piece is pressed onto the polishing cloth adhered on a polishing plate and the work piece is relatively moved with respect to the polishing plate with supplying slurry to the polishing cloth so as to polish the work piece. The equipment comprises a nozzle unit having a nozzle capable of spraying high-pressure washing water toward the polishing cloth so as to clean the polishing cloth. The nozzle is a straight nozzle capable of linearly spraying the washing water and perpendicularly spraying the washing water with respect to the polishing cloth.
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