PRE-ALIGNED NOZZLE/SKIMMER
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United States of America Patent
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Issued Date -
Sep 30, 2010
app pub date -
Mar 31, 2009
filing date -
Mar 31, 2009
priority date (Note) -
Abandoned
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Abstract
The pre-aligned nozzle/skimmer module includes an internal pre-aligned nozzle assembly and internal pre-aligned skimmer cartridge assembly to more accurately control the formation of the Gas Cluster Ion Beam (GCIB). The nozzle/skimmer module can be pre-aligned to more accurately position the GCIB. The pre-aligned nozzle/skimmer module more accurately controls the formation of the gas clusters of a pre-aligned Gas Cluster Ion Beam (GCIB).
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