MAPPING MECHANISM, FOUP AND LOAD PORT
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Sep 30, 2010
app pub date -
Mar 29, 2010
filing date -
Mar 27, 2009
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
Disclosed herein is a mapping mechanism for carrying out mapping for a FOUP which includes a wafer receiving section on which a plurality of wafers can be placed at a plurality of stages in a heightwise direction and a lid member mounted for opening and closing movement, including: a light emitting member and a light receiving member provided outside the FOUP; and a window member provided on a light path between the light emitting member and the light receiving member which can cross at least part of the wafers placed on the stage portions of the wafer receiving section; the light being caused to pass over all of the stages of the wafer receiving section of the FOUP to carry out the mapping for the FOUP.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully