METHODS AND PRODUCTS FOR REPLENISHING A POLISHING SLURRY IN A POLISHING APPARATUS
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United States of America Patent
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Issued Date -
Sep 30, 2010
app pub date -
Mar 24, 2009
filing date -
Mar 24, 2009
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Abstract
Methods and products for replenishing a polishing slurry in a chemical-mechanical polishing apparatus. A preformulated polishing slurry is packaged within a container having flexible walls. When it is time to replenish the polishing slurry in a polishing apparatus, an operator manipulates the sealed container by hand, which causes deformation of the container walls. The deformation of the container walls leads to the rapid and substantially complete resuspension of the abrasive particles into the polishing slurry. Once the abrasive particles have been sufficiently resuspended, the container having flexible walls is unsealed and the polishing slurry is poured into a slurry tank associated with the polishing apparatus.
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