X-Ray Assisted Etching of Insulators
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United States of America Patent
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app pub date -
Jun 5, 2009
filing date -
Dec 21, 2006
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Abandoned
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Abstract
The invention is a method of electrochemical etching of a non-conductive insulator. The method entails inducing a current in the insulator by exciting electrons into the conduction band by supplying the needed energy through irradiation of the insulator. Alternatively, electrons may be supplied externally from an electron gun. The insulator is subject to an electrical bias, and the induced or supplied electrons then create a current in the insulator that effects the etch rated.
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