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United States of America Patent

APP PUB NO 20100231118A1
SERIAL NO

12678038

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Abstract

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film using a magnetron sputtering apparatus capable of sputtering at a low electron temperature.

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Patent Owner(s)

Patent OwnerAddress
FOUNDATION FOR ADVANCEMENT OF INTERNATIONAL SCIENCE586-9 USHIGAFUCHI AKATSUKA TSUKUBA-CITY IBARAKI PREFECTURE 305-0062
NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY1-1 KATAHIRA 2-CHOME AOBA-KU SENDAI-SHI MIYAGI 980-8577

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goto, Tetsuya Miyagi, JP 123 2118
Ohmi, Tadahiro Miyagi, JP 798 14083

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