Compact Scanning Electron Microscope
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United States of America Patent
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app pub date -
Jun 7, 2007
filing date -
Jun 7, 2006
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Abandoned
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Abstract
A compact electron microscope is robust, simple to operate, and preferably requires no special utilities. Imaging can begin shortly after a sample is inserted. A preferred simplified design includes permanent magnets for focusing, lack a vacuum controller and vacuum gauge, and uses a backscattered electron detector and no secondary electron detector.
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