STOCKER APPARATUS AND SUBSTRATE TREATING APPARATUS
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United States of America Patent
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Issued Date -
Sep 9, 2010
app pub date -
Jan 26, 2010
filing date -
Jan 26, 2009
priority date (Note) -
Abandoned
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Abstract
A stocker apparatus includes openers for receiving FOUPs acting as containers each for storing a plurality of substrates, to feed and collect the substrates to/from a substrate treating apparatus main body, a transport mechanism for holding and transporting the FOUPs, and racks arranged above the openers for receiving the FOUPs. The racks include an incoming rack for receiving the FOUPs from an external transport device, an outgoing rack for delivering the FOUPs to the external transport device, and a mid-treatment storage rack for keeping an empty FOUP after the substrates are fed therefrom. The openers include a feed-only opener for feeding the substrates, and a collect-only opener for collecting the substrates.
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