METHOD FOR FORMING W-BASED FILM, METHOD FOR FORMING GATE ELECTRODE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

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Sep 9, 2010
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Aug 9, 2006
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Aug 10, 2005

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gas and the supply of the Si-containing gas.

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Patent Owner	Address
ANTIBIOTICOS S P A	STRADA RIVOLTANA KM 6/7 RODANO

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor Name	Address	# of filed Patents	Total Citations
Yamasaki, Hideaki	Yamanashi, JP	71	1927

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METHOD FOR FORMING W-BASED FILM, METHOD FOR FORMING GATE ELECTRODE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

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United States of America Patent

11997798

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