Method for fabricating carbon nanotube array
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United States of America Patent
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Issued Date -
Sep 9, 2010
app pub date -
Sep 15, 2006
filing date -
Dec 9, 2005
priority date (Note) -
Abandoned
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Abstract
A method for fabricating a super-aligned carbon nanotube array includes the following steps: (1) providing a flat and smooth substrate (11); (2) depositing a catalyst layer (12) on the substrate at a rate of less than about 5 nm/s; (3) annealing the catalyst layer at atmosphere; (4) positioning the substrate with the catalyst layer into a furnace; (5) heating the furnace up to a predetermined temperature; and (6) supplying a reaction gas into the furnace, thereby growing a number of carbon nanotubes (22) on the substrate, via the catalyst layer, such that the carbon nanotube array is formed on the substrate.
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