OPTICAL PROCESSING METHOD AND MASK
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United States of America Patent
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app pub date -
Feb 24, 2010
filing date -
Mar 6, 2009
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Abstract
An optical processing method includes the steps of: moving an irradiation region of light in a direction orthogonal to a width direction of a mask having openings aligned in the width direction while irradiating the light to a processing object via the mask; and when irradiating light across one width of the mask and moving the irradiation region in a latter stage after irradiation of light across one width of the mask and movement of the irradiation region in a former stage end, superimposing a part of a light irradiation portion by the irradiation of light across one width of the mask and the movement in the former stage and a part of a light irradiation portion by the irradiation of light across one width of the mask and the movement in the latter stage to make an irradiation amount equal in each irradiation line corresponding to the respective openings.
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