Micro-electromechanical system fabry-perot filter cavity
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United States of America Patent
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Issued Date -
Sep 2, 2010
app pub date -
Jun 6, 2006
filing date -
Jun 6, 2006
priority date (Note) -
Abandoned
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Abstract
According to some embodiments, a micro-electrical mechanical system apparatus includes an actuator within a plane and at least one movable mirror oriented substantially normal to the plane. The actuator may move the movable mirror with respect to a fixed mirror oriented substantially normal to the plane and substantially parallel to the movable mirror. The space between the fixed and movable mirrors might comprise, for example, a Fabry-Perot filter cavity for a spectrometer.
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