MULTI-LAYERED INTERCONNECT STRUCTURE USING LIQUID CRYSTALLINE POLYMER DIELECTRIC

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United States of America Patent

SERIAL NO

12776771

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Abstract

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A multi-layered interconnect structure and method of formation. In a first embodiment, first and second liquid crystal polymer (LCP) dielectric layers are directly bonded, respectively, to first and second opposing surface of a thermally conductive layer, with no extrinsic adhesive material bonding the thermally conductive layer with either the first or second LCP dielectric layer. In a second embodiment, first and second 2S1P substructures are directly bonded, respectively, to first and second opposing surfaces of a LCP dielectric joining layer, with no extrinsic adhesive material bonding the LCP dielectric joining layer with either the first or second 2S1P substructures.

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Patent Owner(s)

Patent OwnerAddress
ULTRATECH INC3050 ZANKER ROAD SAN JOSE CA 95134

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Egitto, Frank D Binghamton, US 86 1287
Farquhar, Donald S Endicott, US 55 1230
Markovich, Voya R Endwell, US 198 5225
Poliks, Mark D Vetal, US 43 1214
Powell, Douglas O Endicott, US 39 1005

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