SCANNING PROBE MICROSCOPE CAPABLE OF MEASURING SAMPLES HAVING OVERHANG STRUCTURE
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United States of America Patent
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app pub date -
May 4, 2010
filing date -
Sep 29, 2006
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Abandoned
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Abstract
A scanning probe microscope images a surface of a sample by scanning the sample along a forward path while collecting data for imaging the surface of the sample, recording an uppermost position of the probe while the sample is scanning along the forward path, and scanning the sample along a return path while the probe is positioned higher than the uppermost position of the probe. The return scanning speed is configured to be higher than the forward scanning speed so that the surface image can be obtained rapidly. Also, the return path tracks the forward path until the beginning of the forward path is reached. In this manner, positioning errors caused by hysteresis in the scanning system can be eliminated.
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