PROCESSES AND EQUIPMENTS FOR PREPARING F2-CONTAINING GASES, AS WELL AS PROCESSES AND EQUIPMENTS FOR MODIFYING THE SURFACES OF ARTICLES

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United States of America Patent

SERIAL NO

12769611

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Abstract

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gas is obtained immediately before surface modification.

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Patent Owner(s)

Patent OwnerAddress
KANTO DENKA KOGYO CO LTDCHIYODA-KU TOKYO 100-0005

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fukae, Katsuya Shibukawa-shi, JP 9 253
Tanioka, Takashi Shibukawa-shi, JP 8 66
Yonemura, Taisuke Chiyoda-ku, JP 9 55

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