Particle beam system
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United States of America Patent
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N/A
Issued Date -
Aug 12, 2010
app pub date -
Feb 8, 2010
filing date -
Feb 9, 2009
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
oriented towards the object plane. A membrane is disposed between the object plane and the detection surface of the semiconductor detector, wherein different semiconductor detectors have different membranes located in front, the different membranes differing with respect to a secondary electron transmittance.
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