Cantilever Type Sensor
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United States of America Patent
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Issued Date -
Aug 12, 2010
app pub date -
Mar 30, 2006
filing date -
Mar 31, 2005
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A cantilever type sensor includes a cantilever, an actuator that oscillates the cantilever, and a sensor provided at the cantilever so as to detect an oscillation condition of the cantilever. Further, the cantilever type sensor includes a control unit that controls the actuator so as to cause the cantilever to be subjected to pulse excitation, and a measurement unit that measures a physical quantity related to a measurement object, based on a change in pulse response detected in the sensor.
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