Process for the Production of Micro-Structured Construction Units by Means of Optical Lithography

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20100196660A1
SERIAL NO

12699171

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Abstract

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The invention relates to a method for producing micro-structured shaped parts (22) and the resulting products, wherein a first negative or positive photosensitive layer (12) with a layer thickness (D1) is deposited on a substrate (10) and the first negative or positive photosensitive layer (12) is exposed area-by-area with light of a suitable wavelength; a second negative or positive photosensitive layer (12') with a layer thickness (D2) is deposited on the first negative or positive photosensitive layer (12) and exposed area-by-area with light of a suitable wavelength, wherein the exposed regions (16') in the second layer (12') are identical to and/or different from the exposed regions (16) in the first layer (12); the steps of depositing and exposing the photosensitive layer (12, 12') area-by-area are performed repeatedly until a predetermined height H is attained, wherein the exposed regions (16, 16') of the photosensitive layers (12, 12') represent the positive or negative of the microstructure of the shaped part (22); the exposed (16, 16') or the unexposed regions (18, 18') of the shaped part (22) are washed out with a developer; and the remaining preform (20) is subsequently solidified.

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Patent Owner(s)

Patent OwnerAddress
BAM BUNDESANSTALT FUER MATERIALFORSCHUNG UND -PRUEFUNGUNTER DEN EICHEN 87 BERLIN 12205

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
DRESSLER, MARTIN BERLIN, DE 4 18

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