METHOD FOR PREPARING TRANSPARENT CONDUCTING FILM COATED WITH AZO/AG/AZO MULTILAYER THIN FILM
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United States of America Patent
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Issued Date -
Aug 5, 2010
app pub date -
Feb 25, 2009
filing date -
Feb 5, 2009
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Abstract
A method for preparing a transparent conducting film coated with an AZO/Ag/AZO multilayer thin film with low resistivity and high light transmittance, and a transparent conducting film produced by the same method. The method for preparing a transparent conducting film coated with an AZO/Ag/AZO multilayer thin film, includes (a) forming a primary AZO thin film on a substrate using an AZO target doped with Al through a sputtering method; (b) depositing Ag on the primary AZO thin film using the sputtering method to form a deposited Ag layer; and (c) forming a secondary AZO thin film on the Ag thin film using the AZO target doped with Al through a sputtering method.
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