MANUFACTURING OF ADDUCT FREE ALKALINE-EARTH METAL Cp COMPLEXES

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United States of America Patent

APP PUB NO 20100189898A1
SERIAL NO

12691981

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Methods and compositions for the deposition of a metal containing film on a substrate. The film is deposited with a substantially adduct free precursor which is prepared by a process to remove the adduct from an adducted starting material.

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Patent Owner(s)

Patent OwnerAddress
AIR LIQUIDE ELECTRONICS U S LP2700 POST OAK BLVD SUITE 1800 HOUSTON TX 77056

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Misra, Ashutosh Plano, US 74 1768
WAN, Zhiwen Plano, US 19 47

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