MANUFACTURING OF ADDUCT FREE ALKALINE-EARTH METAL Cp COMPLEXES
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United States of America Patent
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Issued Date -
Jul 29, 2010
app pub date -
Jan 22, 2010
filing date -
Jan 22, 2009
priority date (Note) -
Abandoned
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Abstract
Methods and compositions for the deposition of a metal containing film on a substrate. The film is deposited with a substantially adduct free precursor which is prepared by a process to remove the adduct from an adducted starting material.
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