Interdigital capacitor with Self-Canceling Inductance
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United States of America Patent
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Issued Date -
Jul 15, 2010
app pub date -
Jan 10, 2009
filing date -
Jan 10, 2009
priority date (Note) -
Abandoned
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Abstract
An interdigital capacitor is provided with self-canceling inductance. The capacitor is made of a first metal layer including a first set of fingers connected to a first terminal, and a second set of fingers interdigitated between the first set. A second metal layer including a third set of fingers is connected to a second terminal, and a fourth set of fingers interdigitated between the third set. Each finger in the first set is connected to an overlying finger in the fourth set with at least one via. Each finger in the second set is connected to an overlying finger in the third set with at least one via. The second terminal overlies the first terminal.
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