WAFER LEVEL LENS REPLICATION ON MICRO-ELECTRICAL-MECHANICAL SYSTEMS
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United States of America Patent
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Issued Date -
Jul 15, 2010
app pub date -
Jan 9, 2009
filing date -
Jan 9, 2009
priority date (Note) -
Abandoned
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Abstract
Movable lens structures in which a lens is formed on a micro-electrical-mechanical system and methods of making the same. A method of forming the lens includes forming a micro-electrical-mechanical system on a substrate, arranging a first mold inside the micro-electrical-mechanical system, and forming a lens on the micro-electrical-mechanical system using the first mold.
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