Process for production a thin glasslike coating on substrates for reducing gas permeation

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United States of America Patent

APP PUB NO 20100166977A1
SERIAL NO

11989580

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Abstract

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A method for producing a glassy, transparent coating on a substrate by coating the substrate with a solution containing a) a polysilazane of the formula—where R′, R″, R′″ are identical or different and independently represent hydrogen or an optionally substituted alkyl radical, aryl radical, vinyl radical or (trialkoxysilyl)alkyl radical, n being an integer and or being calculated such that the polysilazane has a number-average molecular weight of from 150 to 150 000 g/mol, and b) a catalyst in an organic solvent, removing the solvent using evaporation such that a polysilazane layer having a layer thickness of 0.05-3.0 μm remains on the substrate, and irradiating the polysilazane layer with VUV radiation having wavelength portions <230 nm and UV radiation having wavelength portions between 230 and 300 nm in an atmosphere containing steam in the presence of oxygen, active oxygen and optional nitrogen.

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Patent Owner(s)

Patent OwnerAddress
AZ ELECTRONIC MATERIALS (LUXEMBOURG) S A R L32-36 BOULEVARD D'AVRANCHES LUXEMBOURG L-1160

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
BRAND, et al Stefan Sulzbach, DE 1 16

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