Housing for A Micro-Column
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United States of America Patent
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Issued Date -
Jul 1, 2010
app pub date -
Feb 23, 2006
filing date -
Feb 24, 2005
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Disclosed therein is a housing for micro-column, which can easily align and assemble the micro-column and improve stability of the micro-column. The housing for manufacturing micro-column including an electron emitter, deflectors, and lenses, the housing includes: an electron emitter holder in which the electron emitter is inserted; a holder base in which the electron emitter holder is inserted; and a column base coupled with the holder base, whereby the electron emitter can be aligned and fixed between the electron emitter holder and the holder base in X- and Y-axial directions via bolts and socket set screws inserted into the tap holes.
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