DEVICE FOR COATING A PLURALITY OF CLOSEST PACKED SUBSTRATES ARRANGED ON A SUSCEPTOR
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United States of America Patent
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Issued Date -
Jul 1, 2010
app pub date -
May 21, 2008
filing date -
May 23, 2007
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The invention relates to a device for coating a plurality of substrates (3) which are regularly arranged on a bearing surface (2) of a susceptor (1) associated to a process chamber (14), wherein the bearing surface (2) forms abutment flanks (5) for the edge mounting of each substrate (3). In order to reduce the free susceptor surface to a minimum, it is proposed that the abutment flanks of the lateral walls (5) are formed by bases (4) which project from the bearing surface (2) and are separated at a distance from one another. Said bases are arranged on the corner points (10) of a honeycomb structure and have an outline essentially corresponding to an equilateral triangle with inwardly curved sides (5).
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