SYSTEMS FOR PRODUCING SILICON TETRAFLUORIDE FROM FLUOROSILICATES IN A FLUIDIZED BED REACTOR
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United States of America Patent
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Issued Date -
Jun 17, 2010
app pub date -
Dec 17, 2009
filing date -
Dec 17, 2008
priority date (Note) -
Abandoned
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Abstract
Systems for preparing silicon tetrafluoride by the thermal decomposition of an alkali or alkaline earth-metal fluorosilicate. The system includes a drying apparatus for removing moisture from a fluorosilicate feed; a fluidized bed reactor comprising a reaction chamber for thermal decomposition of fluorosilicate into silicon tetrafluoride gas and an alkali or alkaline earth-metal fluoride; a heater apparatus and an exhaust gas treatment system for treating gases discharged from the fluidized bed reactor.
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