Multiple-Substrate Transfer Apparatus and Multiple-Substrate Processing Apparatus
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United States of America Patent
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Issued Date -
Jun 17, 2010
app pub date -
Dec 15, 2008
filing date -
Dec 15, 2008
priority date (Note) -
Abandoned
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Abstract
A multiple-substrate processing apparatus includes: a reaction chamber comprised of two discrete reaction stations aligned one behind the other for simultaneously processing two substrates; a transfer chamber disposed underneath the reaction chamber, for loading and unloading substrates to and from the reaction stations simultaneously; and a load lock chamber disposed next to the transfer chamber. The transfer arm includes one or more end-effectors for simultaneously supporting two substrates one behind the other as viewed in the substrate-loading/unloading direction.
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