Elevator-based tool loading and buffering system

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United States of America Patent

SERIAL NO

12696224

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An exemplary embodiment a substrate transport system is provided. The system has a guideway and at least one transport vehicle. The transport vehicle is adapted for holding at least one substrate and capable of being supported from and moving along the guideway. The guideway comprises at least one travel lane for the vehicle and at least one access lane offset from the travel lane allowing the vehicle selectable access on and off the travel lane.

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Patent Owner(s)

Patent OwnerAddress
MURATA MACHINERY LTDKYOTO-SHI KYOTO 601-8326

International Classification(s)

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  • 2010 Application Filing Year
  • E01B Class
  • 81 Applications Filed
  • 60 Patents Issued To-Date
  • 74.08 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances201020112012201320142015201620170255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bufano, Michael L Belmont, US 22 384
Fosnight, William Carlisle, US 43 1550
Friedman, Gerald M New Ipswich, US 20 250
Gilchrist, Ulysses Reading, US 104 1845
Hofmeister, Christopher Hampstead, US 132 3216

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Patent Citation Ranking

  • 2 Citation Count
  • E01B Class
  • 10.61 % this patent is cited more than
  • 15 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges753601 - 1011 - 2002.557.51012.51517.52022.52527.53032.53537.54042.54547.55052.55557.5

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