Repeatable runout evaluation method for a stamper
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United States of America Patent
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Apr 17, 2012
Grant Date -
Jun 10, 2010
app pub date -
Aug 10, 2009
filing date -
Dec 10, 2008
priority date (Note) -
Expired
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Abstract
According to one embodiment, a stamper has three-dimensional patterns in a dummy region. The three-dimensional patterns have a repeatable run out of 1 nm or less between the 15th and 40th orders when the rotational frequency is the first order as a reference.
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