METHOD FOR PRODUCTION OF ALUMINUM CONTAINING TARGETS
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United States of America Patent
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Issued Date -
Jun 10, 2010
app pub date -
Dec 9, 2008
filing date -
Dec 9, 2008
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Abstract
A method of manufacturing a sputter target is provided which comprises mixing aluminum and at least one other metallic powder to form a powder blend, compressing said powder blend under significant force to achieve a pressed blank having a packing density of at least 50% of the theoretical density, heating the blank at a temperature less then the temperature which would form greater than an average of 25% inter-metallic phases in the blank under the conditions employed, rolling the blank to obtain at least 95% of the theoretical thickness of the blank, and bonding the blank to a suitable substrate. Also provided is a sputter target made from this method.
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