Quartz Glass Crucible for Pulling Silicon Single Crystal and Method of Manufacturing Quartz Glass Crucible for Pulling Silicon Single Crystal

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United States of America Patent

APP PUB NO 20100139549A1
SERIAL NO

11922422

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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. Thus, there are provided a quartz glass crucible for pulling a silicon single crystal, the quartz glass crucible being increased in mechanical strength, making it possible to suppress deformation of a quartz glass crucible for pulling a silicon single crystal during a single crystal pulling process, thereby prevent degradation in yield rate due to dislocation in a single crystal and make the manufacture of a silicon single crystal highly efficient and a method of manufacturing the same quartz glass crucible.

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Patent Owner(s)

Patent OwnerAddress
SHIN-ETSU HANDOTAI CO LTDTOKYO
SHIN-ETSU QUARTZ PRODUCTS CO LTDSHINJUKU SAN-EI BLDG 1-22-2 NISHI-SHINJUKU TOKYO 160-0023

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fusegawa, Izumi Fukushima, JP 49 445
Matsui, Hiroshi Fukui, JP 196 2159
Sakurada, Masahiro Fukushima, JP 33 321
Sonokawa, Susumu Fukushima, JP 23 125

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