Photosensitive Composition

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United States of America Patent

APP PUB NO 20100136477A1
SERIAL NO

12325627

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Abstract

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The present invention relates to a novel photosensitive composition comprising a) an organic polymer, b) a photobase generator of structure (1), and c) optionally a photoacid generator,  (1) are independently an onium cation, x is an integer greater than or equal to 1, and B is a nonfluorinated hydrocarbon moiety. The photosensitive composition may be used as a photoresist composition or be used as an alkali developable antireflective underlayer coating composition.

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Patent Owner(s)

Patent OwnerAddress
AZ ELECTRONIC MATERIALS USA CORP70 MEISTER AVENUE SOMERVILLE NJ 08876

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chakrapani, Srinivasan Bridgewater, US 22 338
Felix, Nelson M Ossining, US 32 84
Ng, Edward W Belle Mead, US 6 21
Padmanaban, Munirathna Bridgewater, US 55 936

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