ICE LAYERS IN CHARGED PARTICLE SYSTEMS AND METHODS

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United States of America Patent

SERIAL NO

12625912

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Importance

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Abstract

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Charged particle sources, systems and methods are disclosed.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS NTS LLC615 SOUTH DUPONT HIGHWAY DOVER DE 19901-4517

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Notte,, IV John A Gloucester, US 46 887
Scipioni, Lawrence Bedford, US 20 385
Thompson, William B Los Altos, US 18 414
Ward, Billy W Merrimac, US 46 1989

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