Diaphragm changing device
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United States of America Patent
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Jan 3, 2012
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N/A
app pub date -
Feb 4, 2010
filing date -
Oct 29, 2003
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Abstract
The invention relates to an optical imaging device, in particular an objective 1 for microlithography in the field of EUVL for producing semiconductor components, having a beam path 2, a plurality of optical elements 3 and a diaphragm device 7 with an adjustable diaphragm opening shape. The diaphragm device has a diaphragm store 7a, 7b with a plurality of different diaphragm openings 6 with fixed shapes in each case, which can be introduced into the beam path 2.
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