PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS AND METHOD

Number of patents in Portfolio can not be more than 2000

United States of America Patent

SERIAL NO

12403526

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A projection objective for a microlithography apparatus with improved imaging properties is provided. A manipulator for a projection objective is provided. A microlithography apparatus including a projection objective of this type and/or a manipulator of this type is provided. A method for improving the imaging properties of a projection objective is provided.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT AGRUDOLF-EBER-STRASSE 2 OBERKOCHEN 73447

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Beckenbach, Mariella Heilbronn, DE 1 17
Bertele, Andreas Koenigsbronn, DE 5 32
Bleidistel, Sascha Aalen, DE 43 267
Frommeyer, Andreas Schwaebisch Gmuend, DE 8 44
Gruner, Toralf Aalen-Hofen, DE 173 1727
Hoegele, Artur Oberkochen, DE 32 124
Hummel, Wolfgang Aalen, DE 39 362
Rief, Klaus Aalen-Oberalfingen, DE 16 137
Schletterer, Thomas Stadtroda, DE 19 135
Schoeppach, Armin Aalen, DE 44 250
Schwaer, Baerbel Aalen, DE 8 134
Schwaer, Jochen Aalen, DE 1 17
Sigel, Benjamin Aalen, DE 10 45

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation