PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS AND METHOD
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United States of America Patent
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N/A
Issued Date -
N/A
app pub date -
Mar 13, 2009
filing date -
Sep 28, 2006
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A projection objective for a microlithography apparatus with improved imaging properties is provided. A manipulator for a projection objective is provided. A microlithography apparatus including a projection objective of this type and/or a manipulator of this type is provided. A method for improving the imaging properties of a projection objective is provided.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
CARL ZEISS SMT AG | RUDOLF-EBER-STRASSE 2 OBERKOCHEN 73447 |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Beckenbach, Mariella | Heilbronn, DE | 1 | 17 |
# of filed Patents : 1 Total Citations : 17 | |||
Bertele, Andreas | Koenigsbronn, DE | 5 | 32 |
# of filed Patents : 5 Total Citations : 32 | |||
Bleidistel, Sascha | Aalen, DE | 43 | 267 |
# of filed Patents : 43 Total Citations : 267 | |||
Frommeyer, Andreas | Schwaebisch Gmuend, DE | 8 | 44 |
# of filed Patents : 8 Total Citations : 44 | |||
Gruner, Toralf | Aalen-Hofen, DE | 173 | 1727 |
# of filed Patents : 173 Total Citations : 1727 | |||
Hoegele, Artur | Oberkochen, DE | 32 | 124 |
# of filed Patents : 32 Total Citations : 124 | |||
Hummel, Wolfgang | Aalen, DE | 39 | 362 |
# of filed Patents : 39 Total Citations : 362 | |||
Rief, Klaus | Aalen-Oberalfingen, DE | 16 | 137 |
# of filed Patents : 16 Total Citations : 137 | |||
Schletterer, Thomas | Stadtroda, DE | 19 | 135 |
# of filed Patents : 19 Total Citations : 135 | |||
Schoeppach, Armin | Aalen, DE | 44 | 250 |
# of filed Patents : 44 Total Citations : 250 | |||
Schwaer, Baerbel | Aalen, DE | 8 | 134 |
# of filed Patents : 8 Total Citations : 134 | |||
Schwaer, Jochen | Aalen, DE | 1 | 17 |
# of filed Patents : 1 Total Citations : 17 | |||
Sigel, Benjamin | Aalen, DE | 10 | 45 |
# of filed Patents : 10 Total Citations : 45 |
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Patent Citation Ranking
- 17 Citation Count
- G02B Class
- 51.34 % this patent is cited more than
- 15 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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