METHOD FOR MANFACTURING FLAT PANEL DISPLAY AND PANEL FOR FLAT PANEL DISPLAY
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United States of America Patent
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Issued Date -
May 27, 2010
app pub date -
Dec 16, 2005
filing date -
Dec 16, 2005
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Abstract
A method for forming a film includes a step of forming an insulator layer (17) on a substrate (111) on which electrodes (X and Y) are arranged, by a chemical vapor deposition process. Masks (71 and 72) having a shape covering terminal parts (Xt and Yt) of the electrodes (X and Y) are disposed proximately to the terminal parts (Xt and Yt) so as to be separated from the terminal parts (Xt, Yt) and to be opposed to the same. The insulator is deposited on the electrodes (X and Y) at a deposition rate of chemical vapor deposition that is lower at the terminal parts (Xt and Yt) than at parts of the electrodes (X and Y) that are not covered with the masks (71 and 72).
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