WASHING METHOD AND APPARATUS FOR USE THEREIN
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United States of America Patent
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Issued Date -
May 20, 2010
app pub date -
Nov 8, 2007
filing date -
May 10, 2007
priority date (Note) -
Abandoned
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Abstract
A method of washing an object to be processed, using water containing at least either one selected from a hydrogen radical and a carbon radical, and a novel method capable of exerting sufficient washing effect without using chemicals, by a washing apparatus having a processing bath for washing an object to be processed, and a means for supplying the processing bath with water containing at least either one selected from a hydrogen radical and a carbon radical, and an apparatus for the novel method are provided.
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